Keyword : oxidization


Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
P. Pungboon PANSILA Kensaku KANOMATA Bashir AHMMAD Shigeru KUBOTA Fumihiko HIROSE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2015/05/01
Vol. E98-C  No. 5 ; pp. 382-389
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
Gallium oxidetrimethylgalliumremote plasmaIR absorption spectroscopyadsorptionoxidization
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