Keyword : organosilane self-assembled monolayer

Fabrication of Coplanar Microstructures Composed of Multiple Organosilane Self-Assembled Monolayers
Hiroyuki SUGIMURA Atsushi HOZUMI Osamu TAKAI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/07/25
Vol. E83-C  No. 7 ; pp. 1099-1103
Type of Manuscript:  Special Section PAPER (Special Issue on Organic Molecular Electronics for the 21st Century)
Category: Ultra Thin Film
photolithographyorganosilane self-assembled monolayerchemical vapor depositionscanning probe microscopeexcimer lamp
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