Keyword : optical lithography


A 600-700 GHz Resonant Distributed Junction for a Fixed-Tuned Waveguide Receiver
Teruhiko MATSUNAGA Cheuk-yu Edward TONG Raymond BLUNDELL Takashi NOGUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/03/01
Vol. E85-C  No. 3 ; pp. 738-741
Type of Manuscript:  Special Section PAPER (Special Issue on Superconductive Electronics)
Category: Mixers and Detectors
Keyword: 
SIS transmission lineresonatoroptical lithographystressreceiver noise temperature
 Summary | Full Text:PDF

Phase-Shifting Technology for ULSI Patterning
Tsuneo TERASAWA Shinji OKAZAKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/01/25
Vol. E76-C  No. 1 ; pp. 19-25
Type of Manuscript:  INVITED PAPER (Special Issue on Opto-Electronics and LSI)
Category: Opto-Electronics Technology for LSIs
Keyword: 
optical lithographyultralarge scale integration devicesphase shift maskresolutiondepth of focusstepper
 Summary | Full Text:PDF