Keyword : oblique incidence collimated sputtering

Deposition of Inclined Magnetic Anisotropy Film by Oblique Incidence Collimated Sputtering
Naoki HONDA Akito HONDA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2013/12/01
Vol. E96-C  No. 12 ; pp. 1469-1473
Type of Manuscript:  Special Section PAPER (Special Section on Advanced Elementary Technologies for Information Storage)
inclined anisotropyoblique incidence collimated sputteringpatterned mediamagnetic properties
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