Keyword : objective lens


High-Resolution Wafer Inspection Using the "in-lens SEM"
Fumio MIZUNO Satoru YAMADA Tadashi OHTAKA Nobuo TSUMAKI Toshifumi KOIKE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3 ; pp. 317-323
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: Particle/Defect Control and Analysis
Keyword: 
semiconductor deviceswafer inspectionscanning electron microscopeobjective lenseucentric stageacoustic motorspatial resolutionline-width measurementBEASTLI
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