Keyword : multi-level wiring


Improvement of E-Beam Observability by Testing-Pad Placement in LSI Design Layout
Norio KUJI Tadao TAKEDA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/02/25
Vol. E82-C  No. 2 ; pp. 387-392
Type of Manuscript:  PAPER
Category: Integrated Electronics
Keyword: 
E-beam testerobservabilitystacked viastesting padsmulti-level wiringlocal field effects
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