Keyword : monosilicide


Modulation of PtSi Work Function by Alloying with Low Work Function Metal
Jun GAO Jumpei ISHIKAWA Shun-ichiro OHMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2011/05/01
Vol. E94-C  No. 5 ; pp. 775-779
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
PtSimonosilicidealloywork functionSWC-anneal
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