Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2003/03/01 Vol. E86-CNo. 3 ;
pp. 357-362 Type of Manuscript: Special Section PAPER (Special Issue on the 2002 IEEE International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'02)) Category: Keyword: Monte Carlo simulation, molecular dynamics, mobility, screening, MOSFET,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2000/08/25 Vol. E83-CNo. 8 ;
pp. 1247-1252 Type of Manuscript: Special Section PAPER (Special Issue on 1999 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'99)) Category: Process Modeling and Simulation Keyword: interstitial-silicon, interstitial diffusivity, diffusion-constant, molecular dynamics, ion-implantation damage,
