Keyword : modeling variability


Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-the-Fly Etching Process Modification
Daisuke FUKUDA Kenichi WATANABE Yuji KANAZAWA Masanori HASHIMOTO 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 2015/07/01
Vol. E98-A  No. 7 ; pp. 1467-1474
Type of Manuscript:  Special Section PAPER (Special Section on Design Methodologies for System on a Chip)
Category: 
Keyword: 
etchingmanufacturabilitymodeling variability
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