Keyword : micromirror


Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer
Minoru SASAKI Masahiro ISHIMORI JongHyeong SONG Kazuhiro HANE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Vol. E90-C  No. 1 ; pp. 147-148
Type of Manuscript:  Special Section LETTER (Special Section on Microoptomechatronics)
Category: Micro/Nano Photonic Devices
Keyword: 
micromirrortuningvertical combwafer bending
 Summary | Full Text:PDF

Micromirror with Two Parallel Rotation Axes for External Cavity Diode Laser
Masahiro ISHIMORI Minoru SASAKI Kazuhiro HANE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Vol. E90-C  No. 1 ; pp. 72-77
Type of Manuscript:  Special Section PAPER (Special Section on Microoptomechatronics)
Category: Micro/Nano Photonic Devices
Keyword: 
micromirrortunable laser diodeLittman configurationvertical comb drivewafer bending
 Summary | Full Text:PDF

Surface Micromachined Micro-Opto-Electro-Mechanical Systems
Victor M. BRIGHT John H. COMTOIS J. Robert REID Darren E. SENE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2 ; pp. 206-213
Type of Manuscript:  INVITED PAPER (Special Issue on Micromachine Technology)
Category: 
Keyword: 
MEMSmicromachiningmicromirrormicro-opticsmicro actuator
 Summary | Full Text:PDF