Keyword : micromachining


An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography
Zhen MA David M. KLYMYSHYN Sven ACHENBACH Martin BORNER Nina DAMBROWSKY Jurgen MOHR 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/12/01
Vol. E90-C  No. 12 ; pp. 2192-2197
Type of Manuscript:  Special Section PAPER (Special Section on Recent Technologies for Microwave and Millimeter-wave Passive Devices)
Category: 
Keyword: 
cavity resonatorsmicromachiningRF MEMSX-ray lithographyhigh Q
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RF MEMS--Enabling Technology for Millimeter-Waves
Youngwoo KWON Sanghyo LEE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2006/07/01
Vol. E89-C  No. 7 ; pp. 898-905
Type of Manuscript:  INVITED PAPER (Special Section on Heterostructure Microelectronics with TWHM2005)
Category: 
Keyword: 
MEMSmillimeter-wavemicromachiningpassive device
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High Resolution Long Array Thermal Ink Jet Printhead with On-Chip LSI Heater Plate and Micromachined Si Channel Plate
Michiaki MURATA Masaki KATAOKA Regan NAYVE Atsushi FUKUGAWA Yoshihisa UEDA Tohru MIHARA Masahiko FUJII Toshimichi IWAMORI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/12/01
Vol. E84-C  No. 12 ; pp. 1792-1800
Type of Manuscript:  Special Section PAPER (Special Issue on Integrated Systems with New Concepts)
Category: 
Keyword: 
thermal ink jetmicromachiningdrop ejectorreactive ion etchingelectrostatic bonding
 Summary | Full Text:PDF

Basic Studies of Fiber-Optic MEMS for Telecommunication Using Three Dimensional Micromachining
Kazuhiro HANE Minoru SASAKI JongHyeong SONG Yohei TAGUCHI Kosuke MIURA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/12/01
Vol. E84-C  No. 12 ; pp. 1785-1791
Type of Manuscript:  Special Section PAPER (Special Issue on Integrated Systems with New Concepts)
Category: 
Keyword: 
optical communication systemmicro-electro-mechanical systemsmicromachiningoptical fiber componentstunable optical devices
 Summary | Full Text:PDF

A Compact V-Band Filter/Antenna Integrated Receiver IC Built on Si-Micromachined BCB Suspended Structure
Kazuaki TAKAHASHI Ushio SANGAWA Suguru FUJITA Michiaki MATSUO Takeharu URABE Hiroshi OGURA Hiroyuki YABUKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/10/01
Vol. E84-C  No. 10 ; pp. 1506-1514
Type of Manuscript:  Special Section PAPER (Special Issue on Millimeter-Wave Circuits and Fabrication Technologies Opening up the 21st Century)
Category: 
Keyword: 
micromachiningsuspended linebenzocyclobutenefilterantenna
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Temperature Insensitive Micromachined GaAlAs/GaAs Vertical Cavity Wavelength Filter
Takeru AMANO Fumio KOYAMA Nobuhiko NISHIYAMA Akihiro MATSUTANI Kenichi IGA 
Publication:   IEICE TRANSACTIONS on Communications
Publication Date: 2001/05/01
Vol. E84-B  No. 5 ; pp. 1304-1310
Type of Manuscript:  Special Section PAPER (Joint Special Issue on Recent Progress in Optoelectronics and Communications)
Category: Optical Passive Devices and Modules
Keyword: 
wavelength tuningmicromachiningsemiconductor DBRwavelength trimmingvertical cavity filtermultiple wavelength
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Temperature Insensitive Micromachined GaAlAs/GaAs Vertical Cavity Wavelength Filter
Takeru AMANO Fumio KOYAMA Nobuhiko NISHIYAMA Akihiro MATSUTANI Kenichi IGA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/05/01
Vol. E84-C  No. 5 ; pp. 678-684
Type of Manuscript:  Special Section PAPER (Joint Special Issue on Recent Progress in Optoelectronics and Communications)
Category: Optical Passive Devices and Modules
Keyword: 
wavelength tuningmicromachiningsemiconductor DBRwavelength trimmingvertical cavity filtermultiple wavelength
 Summary | Full Text:PDF

Design, Process, and Evaluation of a Tunable Optical Fabry-Perrot Filter Using a Silicon Capacitive Pressure Sensor
Kenichiro SUZUKI Takefumi OGUMA Tetsuji UEDA Takashi SHIBUYA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/09/25
Vol. E83-C  No. 9 ; pp. 1435-1440
Type of Manuscript:  Special Section PAPER (Special Issue on Current Electromechanical Devices and Their Materials with Recent Innovations)
Category: 
Keyword: 
tunable optical filterFabry-Perrotcapacitive pressure sensorboron-doped siliconmicromachining
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Surface Micromachined Micro-Opto-Electro-Mechanical Systems
Victor M. BRIGHT John H. COMTOIS J. Robert REID Darren E. SENE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2 ; pp. 206-213
Type of Manuscript:  INVITED PAPER (Special Issue on Micromachine Technology)
Category: 
Keyword: 
MEMSmicromachiningmicromirrormicro-opticsmicro actuator
 Summary | Full Text:PDF

Fabrication of Micro-Pipes and Their Applications to Single-Mode Fiber Switching and Splicing
Shinji NAGAOKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2 ; pp. 280-284
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachine Technology)
Category: Optical Application
Keyword: 
micromachiningoptical switchsingle-mode fibermicro-pipe
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Capacitive Pressure Sensor with Center Clamped Diaphragm
Toshihiko OMI Kenji HORIBATA Fumihiko SATO Masashi TAKEUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2 ; pp. 263-268
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachine Technology)
Category: Sensor
Keyword: 
capacitancepressure sensorlinearitydiaphragmmicromachining
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AlGaAs/GaAs Micromachining for Monolithic Integration of Micromechanical Structures with Laser Diodes
Yuji UENISHI Hidenao TANAKA Hiroo UKITA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1995/02/25
Vol. E78-C  No. 2 ; pp. 139-145
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachines and Micro Electro Mechanical Systems)
Category: 
Keyword: 
micromachiningmicrostructuresintegrated sensorsintegrated opticsmicroelectro mechanical systemsMEMS
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