Keyword : micromachines


Recent MEMS Research Activities in Japan
Hiroyuki FUJITA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2 ; pp. 198-205
Type of Manuscript:  INVITED PAPER (Special Issue on Micromachine Technology)
Category: 
Keyword: 
MEMSmicromachinesactuatorssensors
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