Keyword : micromachine


Micromachined RF Devices for Concurrent Integration on Dielectric-Air-Metal Structures
Tamotsu NISHINO Masatake HANGAI Yukihisa YOSHIDA Sang-Seok LEE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2010/07/01
Vol. E93-C  No. 7 ; pp. 1111-1118
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Microwave and Millimeter-Wave Technologies)
Category: 
Keyword: 
micromachineMEMShollow waveguidesGCPWfiltershybridsMEMS switchessilicon
 Summary | Full Text:PDF(1.9MB)

Microoptomechatronics: An Overview
Kiyoshi ITAO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Vol. E90-C  No. 1 ; pp. 3-5
Type of Manuscript:  INVITED REVIEW PAPER
Category: 
Keyword: 
microoptomechatronicsmicromachinenanomechatronicsnanomachineMEMSNEMS
 Summary | Full Text:PDF(673.8KB)

Analysis of Resonant Frequency of Fast Scanning Micromirror with Vertical Combdrives
Hiroyuki WADA Daesung LEE Stefan ZAPPE Olav SOLGAARD 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/11/01
Vol. E87-C  No. 11 ; pp. 2006-2008
Type of Manuscript:  LETTER
Category: Electromechanical Devices and Components
Keyword: 
MEMSmicromachinescanning mirrorvertical combdrivesresonant frequency
 Summary | Full Text:PDF(158.8KB)

Lithography Process for Trench Pattern above Large Cavity to Fabricate Fast Scanning Micromirror
Hiroyuki WADA Daesung LEE Stefan ZAPPE Uma KRISHNAMOORTHY Olav SOLGAARD 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/08/01
Vol. E87-C  No. 8 ; pp. 1395-1398
Type of Manuscript:  LETTER
Category: Electromechanical Devices and Components
Keyword: 
MEMSmicromachinelithography processscanning mirrorcombdrives
 Summary | Full Text:PDF(279KB)

Development of High Voltage Photovoltaic Micro-Devices for Driving Micro Actuators
Takahisa SAKAKIBARA Hiroaki IZU Hisaki TARUI Seiichi KIYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2 ; pp. 309-313
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachine Technology)
Category: Energy
Keyword: 
micromachinephotovoltaic deviceenergy supplylaser processing3-dimensional interconnection
 Summary | Full Text:PDF(486.1KB)

Microassembly System for Integration of MEMS Using the Surface Activated Bonding Method
Tadatomo SUGA Yuzo ISHII Naoe HOSODA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2 ; pp. 297-302
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachine Technology)
Category: Fabrication
Keyword: 
bondingsurface activated bondingassemblymicro-systemintegrationMEMSmicromachineWWW
 Summary | Full Text:PDF(1.1MB)