Keyword : microelectro mechanical system


Driving Voltage Analysis for Fast Response of Waveguide Optical Switch Based on Movement of Liquid Droplet Driven by Electrostatic Force
Takuji IKEMOTO Yasuo KOKUBUN 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/12/01
Vol. E91-C  No. 12 ; pp. 1923-1932
Type of Manuscript:  PAPER
Category: Optoelectronics
Keyword: 
optical switchmicroelectro mechanical systemmicrochanneldropletelectrostatic force
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