Keyword : microchannel


Driving Voltage Analysis for Fast Response of Waveguide Optical Switch Based on Movement of Liquid Droplet Driven by Electrostatic Force
Takuji IKEMOTO Yasuo KOKUBUN 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/12/01
Vol. E91-C  No. 12 ; pp. 1923-1932
Type of Manuscript:  PAPER
Category: Optoelectronics
Keyword: 
optical switchmicroelectro mechanical systemmicrochanneldropletelectrostatic force
 Summary | Full Text:PDF(965.2KB)

Fabrication of Microchannel with Thin Cover Layer for an Optical Waveguide MEMS Switch Based on Microfluidics
Takuji IKEMOTO Yasuo KOKUBUN 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Vol. E90-C  No. 1 ; pp. 78-86
Type of Manuscript:  Special Section PAPER (Special Section on Microoptomechatronics)
Category: Micro/Nano Photonic Devices
Keyword: 
optical switchmicroelectromechanical systemmicrochannelDamascene processthin cover layer
 Summary | Full Text:PDF(2.3MB)