Keyword : micro-optics


Micromechanical Photonic Integrated Circuits
Ming C. WU Li FAN Guo-Dong SU 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/06/25
Vol. E83-C  No. 6 ; pp. 903-911
Type of Manuscript:  INVITED PAPER (Special Issue on Advanced Optical Devices for Next Generation High-Speed Communication Systems and Photonic Networks)
Category: Switches and Novel Devices
Keyword: 
MEMSoptical MEMSMOEMSphotonic integrated circuitsmicro-opticsoptical interconnect
 Summary | Full Text:PDF

Surface Micromachined Micro-Opto-Electro-Mechanical Systems
Victor M. BRIGHT John H. COMTOIS J. Robert REID Darren E. SENE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2 ; pp. 206-213
Type of Manuscript:  INVITED PAPER (Special Issue on Micromachine Technology)
Category: 
Keyword: 
MEMSmicromachiningmicromirrormicro-opticsmicro actuator
 Summary | Full Text:PDF