Keyword : micro-electro-mechanical systems

Basic Studies of Fiber-Optic MEMS for Telecommunication Using Three Dimensional Micromachining
Kazuhiro HANE Minoru SASAKI JongHyeong SONG Yohei TAGUCHI Kosuke MIURA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/12/01
Vol. E84-C  No. 12 ; pp. 1785-1791
Type of Manuscript:  Special Section PAPER (Special Issue on Integrated Systems with New Concepts)
optical communication systemmicro-electro-mechanical systemsmicromachiningoptical fiber componentstunable optical devices
 Summary | Full Text:PDF