Keyword : micro electro machanical systems


Optical MEMS
Hiroyuki FUJITA Hiroshi TOSHIYOSHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/09/25
Vol. E83-C  No. 9 ; pp. 1427-1434
Type of Manuscript:  INVITED PAPER (Special Issue on Current Electromechanical Devices and Their Materials with Recent Innovations)
Category: 
Keyword: 
MEMSmicro electro machanical systemsoptical switchscannertunable filterintegrated optics
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