Keyword : metrology


Ultra-Stable Regeneratively Mode-Locked Laser as an Opto-Electronic Microwave Oscillator and Its Application to Optical Metrology
Masataka NAKAZAWA Masato YOSHIDA Toshihiko HIROOKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/02/01
Vol. E90-C  No. 2 ; pp. 443-449
Type of Manuscript:  INVITED PAPER (Special Section on Evolution of Microwave and Millimeter-Wave Photonics Technology)
Category: 
Keyword: 
ultrafast lasersmode-locked lasershigh-speed optical transmissionoptical standardsmetrology
 Summary | Full Text:PDF(915KB)

A New CD Measurement Method Linked with the Electrical Properties of Devices
Fumio KOMATSU Motosuke MIYOSHI Hiromu FUJIOKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/07/25
Vol. E82-C  No. 7 ; pp. 1347-1352
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
CD SEMmetrologycurved structureelectrical propertiesarea and perimeter
 Summary | Full Text:PDF(2MB)