Keyword : measurement accuracy


Improved Measurement Accuracy of a Laser Interferometer: Extended Kalman Filter Approach
Wooram LEE Dongkyun KIM Kwanho YOU 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 2010/10/01
Vol. E93-A  No. 10 ; pp. 1820-1823
Type of Manuscript:  LETTER
Category: Systems and Control
Keyword: 
heterodyne interferometerextended Kalman filtermeasurement accuracynonlinearityerror compensation
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Precise Linewidth Measurement Using a Scanning Electron Probe
Fumio MIZUNO Satoru YAMADA Akihiro MIURA Kenji TAKAMOTO Tadashi OHTAKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/04/25
Vol. E76-C  No. 4 ; pp. 600-606
Type of Manuscript:  Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
LSImetrology systemscanning electron probemeasurement accuracyreproducibilitylinearityrepeatability
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