IEICE Trans

Keyword : magnetron sputtering

Characteristcs of Ga-Doped ZnO Films Prepared by RF Magnetron Sputtering in Ar+H₂ Ambience Koichi MUTO Satoru ODASHIMA Norimitsu NASU Osamu MICHIKAMI
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2008/10/01 Vol. E91-C No. 10 ; pp. 1649-1652 Type of Manuscript: Special Section PAPER (Special Section on Functional Thin Films for Optical Applications) Category: Keyword: Ga-doped ZnO thin film, magnetron sputtering, Ar+H₂ gas, transparent and conductive film,
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High-Luminance EL Devices Using Zn₂Si_1-XGe_XO₄:Mn Thin Films Prepared by Combinatorial Deposition by r.f. Magnetron Sputtering with Subdivided Powder Targets Toshihiro MIYATA Yu MOCHIZUKI Tadatsugu MINAMI
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2005/11/01 Vol. E88-C No. 11 ; pp. 2065-2069 Type of Manuscript: INVITED PAPER (Special Section on Electronic Displays) Category: Keyword: combinatorial deposition, subdivided powder targets, magnetron sputtering, phosphor, thin-film, electroluminescence,
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Superconducting Properties of EuBa₂Cu₃O₇ Thin Films Deposited on R-Plane Sapphires with CeO₂Sm₂O₃ Buffer Layers Using Magnetron Sputtering Osamu MICHIKAMI Yasuyuki OTA Shinji KIKUCHI
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2004/02/01 Vol. E87-C No. 2 ; pp. 197-201 Type of Manuscript: Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering) Category: Keyword: magnetron sputtering, sapphire, CeO₂ buffer layer, EuBa₂Cu₃O₇(EBCO) thin film, critical current density,
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High Rate Sputter-Deposition of TiO₂ Films Using Oxide Target Yoichi HOSHI Tomoki TAKAHASHI
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2004/02/01 Vol. E87-C No. 2 ; pp. 227-231 Type of Manuscript: Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering) Category: Keyword: TiO₂ film, magnetron sputtering, high-rate sputtering, oxide target, ion mass analysis,
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Recovery Treatment for EuBa₂Cu₃O_7-δ Films with Insulating Multilayers Hironori WAKANA Masaki FUJIBAYASHI Noriyoshi FUSHIMI Osamu MICHIKAMI
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2002/03/01 Vol. E85-C No. 3 ; pp. 780-783 Type of Manuscript: Special Section PAPER (Special Issue on Superconductive Electronics) Category: Thin Films and Materials Keyword: recovery treatment, EuBa₂Cu₃O₇ films, insulating multilayers, magnetron sputtering,
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