Keyword : magnetron sputtering


Characteristcs of Ga-Doped ZnO Films Prepared by RF Magnetron Sputtering in Ar+H2 Ambience
Koichi MUTO Satoru ODASHIMA Norimitsu NASU Osamu MICHIKAMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/10/01
Vol. E91-C  No. 10 ; pp. 1649-1652
Type of Manuscript:  Special Section PAPER (Special Section on Functional Thin Films for Optical Applications)
Category: 
Keyword: 
Ga-doped ZnO thin filmmagnetron sputteringAr+H2 gastransparent and conductive film
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High-Luminance EL Devices Using Zn2Si1-XGeXO4:Mn Thin Films Prepared by Combinatorial Deposition by r.f. Magnetron Sputtering with Subdivided Powder Targets
Toshihiro MIYATA Yu MOCHIZUKI Tadatsugu MINAMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2005/11/01
Vol. E88-C  No. 11 ; pp. 2065-2069
Type of Manuscript:  INVITED PAPER (Special Section on Electronic Displays)
Category: 
Keyword: 
combinatorial depositionsubdivided powder targetsmagnetron sputteringphosphorthin-filmelectroluminescence
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Superconducting Properties of EuBa2Cu3O7 Thin Films Deposited on R-Plane Sapphires with CeO2Sm2O3 Buffer Layers Using Magnetron Sputtering
Osamu MICHIKAMI Yasuyuki OTA Shinji KIKUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/02/01
Vol. E87-C  No. 2 ; pp. 197-201
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering)
Category: 
Keyword: 
magnetron sputteringsapphireCeO2 buffer layerEuBa2Cu3O7(EBCO) thin filmcritical current density
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High Rate Sputter-Deposition of TiO2 Films Using Oxide Target
Yoichi HOSHI Tomoki TAKAHASHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/02/01
Vol. E87-C  No. 2 ; pp. 227-231
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering)
Category: 
Keyword: 
TiO2 filmmagnetron sputteringhigh-rate sputteringoxide targetion mass analysis
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Recovery Treatment for EuBa2Cu3O 7-δ Films with Insulating Multilayers
Hironori WAKANA Masaki FUJIBAYASHI Noriyoshi FUSHIMI Osamu MICHIKAMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/03/01
Vol. E85-C  No. 3 ; pp. 780-783
Type of Manuscript:  Special Section PAPER (Special Issue on Superconductive Electronics)
Category: Thin Films and Materials
Keyword: 
recovery treatmentEuBa2Cu3O 7 filmsinsulating multilayersmagnetron sputtering
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