Keyword : low-voltage power MOSFETs


An Application of Laser Annealing Process in Low-Voltage Planar Power MOSFETs
Yi CHEN Tatsuya OKADA Takashi NOGUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2016/05/01
Vol. E99-C  No. 5 ; pp. 601-603
Type of Manuscript:  BRIEF PAPER
Category: Semiconductor Materials and Devices
Keyword: 
low-voltage power MOSFETslaser annealingshallow junctionthreshold-voltage variationelectrical characteristics
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