Keyword : low-temperature

Process and Device Technologies of CMOS Devices for Low-Voltage Operation
Masakazu KAKUMU 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/05/25
Vol. E76-C  No. 5 ; pp. 672-680
Type of Manuscript:  INVITED PAPER (Special Section on Low-Power and Low-Voltage Integrated Circuits)
CMOSSOISIMOXMOSFETlow-voltagelow-temperaturethreshold voltage high-speedpower-supply voltagesubthreshold currentcircuit performancepower dissipation
 Summary | Full Text:PDF

Low-Temperature Reactive Ion Etching for Multi-Layer Resist
Tetsuo SATO Tomoaki ISHIDA Masahiro YONEDA Kazuo NAKAMOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/04/25
Vol. E76-C  No. 4 ; pp. 607-612
Type of Manuscript:  Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies)
Category: Process Technology
low-temperaturemulti-layer resistmagnetically enhanced RIEside wall protectionneedle shaped residue
 Summary | Full Text:PDF