Keyword : low voltage sputtering


Low Temperature Deposition of Indium Tin Oxide Thin Films by Low Voltage Sputtering in Various Rare Gases
Yoichi HOSHI Hidehiko SHIMIZU 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/02/01
Vol. E87-C  No. 2 ; pp. 212-217
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering)
Category: 
Keyword: 
ITOlow voltage sputteringKr gas sputteringXe gas sputteringlow temperature deposition
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