Keyword : low temperature deposition


Transparent Organic Light-Emitting Diodes with Top Electrode Using Ion-Plating Method
Hironao SANO Ryota ISHIDA Tatsuya KURA Shunsuke FUJITA Shigeki NAKA Hiroyuki OKADA Takeshi TAKAI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2015/11/01
Vol. E98-C  No. 11 ; pp. 1035-1038
Type of Manuscript:  BRIEF PAPER
Category: 
Keyword: 
organic light-emitting diodeion-platingtransparent electrodehigh deposition ratelow temperature deposition
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Low Temperature Deposition of Indium Tin Oxide Thin Films by Low Voltage Sputtering in Various Rare Gases
Yoichi HOSHI Hidehiko SHIMIZU 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/02/01
Vol. E87-C  No. 2 ; pp. 212-217
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering)
Category: 
Keyword: 
ITOlow voltage sputteringKr gas sputteringXe gas sputteringlow temperature deposition
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