Keyword : low temperature bonding


Optical Microsensors Integration Technologies for Biomedical Applications
Eiji HIGURASHI Renshi SAWADA Tadatomo SUGA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2009/02/01
Vol. E92-C  No. 2 ; pp. 231-238
Type of Manuscript:  INVITED PAPER (Special Section on Recent Advances in Integrated Photonic Devices)
Category: 
Keyword: 
microsensorshybrid integrationpassive alignmentlow temperature bondinglaser Doppler flowmetry
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