Keyword : low pressure chemical vapor deposition

Selective Growth of Self-Assembling Si and SiGe Quantum Dots
Katsunori MAKIHARA Mitsuhisa IKEDA Seiichi MIYAZAKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2014/05/01
Vol. E97-C  No. 5 ; pp. 393-396
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
self-assembling Si quantum dotsselective growthlow pressure chemical vapor deposition
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