Keyword : lithium niobate/silicon structure


Low-Temperature Au-to-Au Bonding for LiNbO3/Si Structure Achieved in Ambient Air
Ryo TAKIGAWA Eiji HIGURASHI Tadatomo SUGA Satoshi SHINADA Tetsuya KAWANISHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Vol. E90-C  No. 1 ; pp. 145-146
Type of Manuscript:  Special Section LETTER (Special Section on Microoptomechatronics)
Category: Micro/Nano Fabrication
Keyword: 
low-temperature bondingAu-to-Au bondingsurface-activated bondinglithium niobate/silicon structurehybrid integration
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