Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1992/06/25
Vol. E75-C
No. 6 ;
pp. 698-706
Type of Manuscript:
Special Section PAPER (Special Issue on MMIC Technology)
Category:
Keyword:
monolithic, multilayer, dielectric film, TFMS, size reduction, layout flexibility, |
N-Layer Dielectric Film Structure