Keyword : layout flexibility


Multilayer MMIC Using a 3 µmN-Layer Dielectric Film Structure
Tsuneo TOKUMITSU Takahiro HIRAOKA Hiroyuki NAKAMOTO Masayoshi AIKAWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/06/25
Vol. E75-C  No. 6 ; pp. 698-706
Type of Manuscript:  Special Section PAPER (Special Issue on MMIC Technology)
Category: 
Keyword: 
monolithicmultilayerdielectric filmTFMSsize reductionlayout flexibility
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