Keyword : laser annealing


An Application of Laser Annealing Process in Low-Voltage Planar Power MOSFETs
Yi CHEN Tatsuya OKADA Takashi NOGUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2016/05/01
Vol. E99-C  No. 5 ; pp. 601-603
Type of Manuscript:  BRIEF PAPER
Category: Semiconductor Materials and Devices
Keyword: 
low-voltage power MOSFETslaser annealingshallow junctionthreshold-voltage variationelectrical characteristics
 Summary | Full Text:PDF(569KB)

An Application of Laser Annealing Process in Low-Voltage Power MOSFETs
Yi CHEN Tatsuya OKADA Takashi NOGUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2016/05/01
Vol. E99-C  No. 5 ; pp. 516-521
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
power MOSFETslaser annealingshallow junctionelectrical characteristics
 Summary | Full Text:PDF(1MB)