Keyword : junction leakage current

Fabrication of 100 nm Width Fine Active-Region Using LOCOS Isolation
Daisuke NOTSU Naoya IKECHI Yasuyuki AOKI Nobuyuki KAWAKAMI Kentaro SHIBAHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/05/01
Vol. E85-C  No. 5 ; pp. 1119-1124
Type of Manuscript:  Special Section PAPER (Special Issue on Advanced Sub-0.1 µm CMOS Devices)
Category: 
Keyword: 
LOCOS, junction leakage current, PSL, isolation, bird's beak, 
 Summary | Full Text:PDF(281.5KB)
Electrical Characteristics of Silicon Devices after UV-Excited Dry Cleaning
Yasuhisa SATO Rinshi SUGINO Masaki OKUNO Toshiro NAKANISHI Takashi ITO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/01/25
Vol. E76-C  No. 1 ; pp. 41-46
Type of Manuscript:  Special Section PAPER (Special Issue on Opto-Electronics and LSI)
Category: Opto-Electronics Technology for LSIs
Keyword: 
dry cleaning, dielectric breakdown, Fowler-Nordheim leakage current, junction leakage current, metal contamination, 
 Summary | Full Text:PDF(582.2KB)