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Keyword : junction leakage current
Fabrication of 100 nm Width Fine Active-Region Using LOCOS Isolation
Daisuke NOTSU
Naoya IKECHI
Yasuyuki AOKI
Nobuyuki KAWAKAMI
Kentaro SHIBAHARA
Publication:
IEICE TRANSACTIONS on Electronics
Publication Date:
2002/05/01
Vol.
E85-C
No.
5
;
pp.
1119-1124
Type of Manuscript:
Special Section PAPER (Special Issue on Advanced Sub-0.1 µm CMOS Devices)
Category:
Keyword:
LOCOS
,
junction leakage current
,
PSL
,
isolation
,
bird's beak
,
Summary
|
Full Text:PDF
(281.5KB)
Electrical Characteristics of Silicon Devices after UV-Excited Dry Cleaning
Yasuhisa SATO
Rinshi SUGINO
Masaki OKUNO
Toshiro NAKANISHI
Takashi ITO
Publication:
IEICE TRANSACTIONS on Electronics
Publication Date:
1993/01/25
Vol.
E76-C
No.
1
;
pp.
41-46
Type of Manuscript:
Special Section PAPER (Special Issue on Opto-Electronics and LSI)
Category:
Opto-Electronics Technology for LSIs
Keyword:
dry cleaning
,
dielectric breakdown
,
Fowler-Nordheim leakage current
,
junction leakage current
,
metal contamination
,
Summary
|
Full Text:PDF
(582.2KB)