Keyword : ion beam


Characteristics of Polytetrafluoroethylene Thin Films Prepared by Ionization-Assisted Deposition
Hiroaki USUI Hiroshi KOSHIKAWA Kuniaki TANAKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1998/07/25
Vol. E81-C  No. 7 ; pp. 1083-1089
Type of Manuscript:  Special Section PAPER (Special Issue on Organic Materials for Optics and Electronics)
Category: 
Keyword: 
ionization-assisted depositionion beampolytetrafluoroethylenePTFEelectrical insulationCu decoration
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