Keyword : ion beam sputtering


Polyimide Waveguides Equipped with Dielectric Multilayer Filter
Mitsuo UKECHI Takuya MIYASHITA Ayumi TAKAHASHI Ryoji KAKU Yumiko KOMINE Takao MASE Tetsuya NISHIMURA Satoshi HIRAYAMA Kenji KAMEDA Kazuhiko ITO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/09/25
Vol. E83-C  No. 9 ; pp. 1458-1459
Type of Manuscript:  Special Section LETTER (Special Issue on Current Electromechanical Devices and Their Materials with Recent Innovations)
Category: 
Keyword: 
waveguidedielectric multilayerWDM filterion beam sputtering
 Summary | Full Text:PDF(333.9KB)

Epitaxial Growth of Bi (2201) Phase in Atomic Layer-by-Layer Deposition by Ion Beam Sputtering Method
Kazuo SAKAI Shinji MIGITA Hiroyuki OTA Hiroshi OTERA Ryozo AOKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/08/25
Vol. E76-C  No. 8 ; pp. 1246-1250
Type of Manuscript:  Special Section PAPER (Special Issue on High-Temperature Superconducting Electronics)
Category: 
Keyword: 
ion beam sputteringBSCCO(2201)ozoneultraviolet lightsuperconductorbuffer layer
 Summary | Full Text:PDF(768.3KB)