Keyword : inverse modeling


Practical Inverse Modeling with SIESTA
Rudolf STRASSER Siegfried SELBERHERR 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/08/25
Vol. E83-C  No. 8 ; pp. 1303-1310
Type of Manuscript:  Special Section PAPER (Special Issue on 1999 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'99))
Category: Simulation Methodology and Environment
Keyword: 
calibrationinverse modelingparameter identificationtool integrationparallel and distributed computation
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Modeling of Channel Boron Distribution in Deep Sub-0.1 µm n-MOSFETs
Shigetaka KUMASHIRO Hironori SAKAMOTO Kiyoshi TAKEUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/06/25
Vol. E82-C  No. 6 ; pp. 813-820
Type of Manuscript:  Special Section PAPER (Special Issue on TCAD for Semiconductor Industries)
Category: 
Keyword: 
deep sub-0.1 [µm] n-MOSFETreverse short channel effectpoint-defect pair diffusion modelinverse modeling
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Inverse Modeling and Its Application to MOSFET Channel Profile Extraction
Hirokazu HAYASHI Hideaki MATSUHASHI Koichi FUKUDA Kenji NISHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/06/25
Vol. E82-C  No. 6 ; pp. 862-869
Type of Manuscript:  INVITED PAPER (Special Issue on TCAD for Semiconductor Industries)
Category: 
Keyword: 
inverse modelingdoping profile extractionMOSFETthreshold voltage
 Summary | Full Text:PDF