Keyword : high resistivity silicon


A Compact Semi-Lumped Coplanar Waveguide Low-Pass Filter Fabricated on High Resistivity Silicon Substrate
Cheng-Yuan HUNG Ru-Yuan YANG Min-Hang WENG Yan-Kuin SU 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/09/01
Vol. E90-C  No. 9 ; pp. 1837-1840
Type of Manuscript:  LETTER
Category: Microwaves, Millimeter-Waves
Keyword: 
coplanar waveguidelow-pass filterhigh resistivity siliconcutoff frequencygroup delay
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