Keyword : hafnia


Thermal Stability of Stacked High-κ Dielectrics on Silicon and Its Improvement by Helium Annealing
Kouichi MURAOKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/01/01
Vol. E87-C  No. 1 ; pp. 9-16
Type of Manuscript:  Special Section PAPER (Special Section on High-κ Gate Dielectrics)
Category: 
Keyword: 
high-temperature annealingsuppression of silicidationheliumzirconiahafniasilicate
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