Keyword : focused ion beam (FIB)


Focused Ion Beam Applications to Failure Analysis of Si Device Chip
Kiyoshi NIKAWA 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 1994/01/25
Vol. E77-A  No. 1 ; pp. 174-179
Type of Manuscript:  Special Section PAPER (Special Section on Reliability)
Category: Failure Physics and Failure Analysis
Keyword: 
focused ion beam (FIB)scanning ion microscope (SIM)scanning electron microscope (SEM)transmission electron microscope (TEM)electron beam probing (EBP)microscopic cross-sectioning and observationmicroscopic crosssectioning and elemental analysisaluminum film microstructure observation
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Redundancy Technique for Ultra-High-Speed Static RAMs
Hiroaki NAMBU Kazuo KANETANI Youji IDEI Kunihiko YAMAGUCHI Toshirou HIRAMOTO Nobuo TAMBA Kunihiko WATANABE Masanori ODAKA Takahide IKEDA Kenichi OHHATA Yoshiaki SAKURAI Noriyuki HOMMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/04/25
Vol. E76-C  No. 4 ; pp. 641-648
Type of Manuscript:  PAPER
Category: Integrated Electronics
Keyword: 
redundancy techniquestatic RAM (SRAM)focused ion beam (FIB)laser chemical vapor deposition (L-CVD)access time
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