Keyword : fixed oxide charge

Evaluation of Fixed Charge and Interface Trap Densities in SIMOX Wafers and Their Effects on Device Characteristics
Shoichi MASUI Tatsuo NAKAJIMA Keisuke KAWAMURA Takayuki YANO Isao HAMAGUCHI Masaharu TACHIMORI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1995/09/25
Vol. E78-C  No. 9 ; pp. 1263-1272
Type of Manuscript:  PAPER
Category: Integrated Electronics
Keyword: 
SOI, fixed oxide charge, interface trap, parasitic capacitance, subthreshold slope, 
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