Keyword : fixed charge


Improvement of Hump Phenomenon of Thin-Film Transistor by SiNX Film
Takahiro KOBAYASHI Naoto MATSUO Akira HEYA Shin YOKOYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2014/11/01
Vol. E97-C  No. 11 ; pp. 1112-1116
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
TFTSiNX filmfixed chargehump phenomenon
 Summary | Full Text:PDF(1.3MB)

Suppression of Charges in Al2O3 Gate Dielectric and Improvement of MOSFET Performance by Plasma Nitridation
Kenzo MANABE Kazuhiko ENDO Satoshi KAMIYAMA Toshiyuki IWAMOTO Takashi OGURA Nobuyuki IKARASHI Toyoji YAMAMOTO Toru TATSUMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/01/01
Vol. E87-C  No. 1 ; pp. 30-36
Type of Manuscript:  Special Section PAPER (Special Section on High-κ Gate Dielectrics)
Category: 
Keyword: 
high-κ gate dielectricaluminum oxideplasma nitridationfixed chargeMOSFET performance
 Summary | Full Text:PDF(953.8KB)