Keyword : facing-target sputtering

Investigation of Low-Damage Sputter-Deposition of ITO Films on Organic Emission Layer
Hao LEI Keisuke ICHIKAWA Meihan WANG Yoichi HOSHI Takayuki UCHIDA Yutaka SAWADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/10/01
Vol. E91-C  No. 10 ; pp. 1658-1662
Type of Manuscript:  Special Section PAPER (Special Section on Functional Thin Films for Optical Applications)
facing-target sputteringindium tin oxidelow damageorganic layershieldγ-electrons
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