| Keyword : fabrication technology
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A Recycling Scheme for Layout Patterns Used in an Old Fabrication Technology Yuji SHIGEHIRO Isao SHIRAKAWA | Publication: IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 1993/06/25
Vol. E76-A
No. 6 ;
pp. 886-893
Type of Manuscript:
Special Section PAPER (Special Section on Papers Selected from 1992 Joint Technical Conference on Circuits/Systems,Computers and Communications (JTC-CSCC'92))
Category: Algorithms for VLSI Design Keyword: VLSI, fabrication technology, mask pattern, layout description, | | Summary | Full Text:PDF(707.2KB) | |
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