Keyword : extrinsic oxide breakdown


Characterization of Extrinsic Oxide Breakdown on Thin Dielectric Oxide
Katsuya SHIGA Junko KOMORI Masafumi KATSUMATA Akinobu TERAMOTO Yoji MASHIKO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/04/25
Vol. E82-C  No. 4 ; pp. 589-592
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: 
Keyword: 
oxide reliabilityextrinsic oxide breakdownTDDBthin oxideactivation energy
 Summary | Full Text:PDF(484.2KB)