Keyword : epitaxy


Novel High-Throughput Plasma Enhanced Growth of SiGe in a 200 mm/300 mm Single Wafer Cluster Tool
Juergen RAMM Hans von KANEL 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/10/01
Vol. E86-C  No. 10 ; pp. 1935-1942
Type of Manuscript:  INVITED PAPER (Special Issue on Heterostructure Microelectronics with TWHM2003)
Category: 
Keyword: 
epitaxyvirtual substratestrained siliconlow temperaturepre-epi cleanplasma
 Summary | Full Text:PDF(2.6MB)

Hetero-Epitaxial PbZr0. 48Ti0. 52O3 Capacitors with Oxide Electrodes
Mitsuo SUGA Masahiko HIRATANI Choichiro OKAZAKI Masanari KOGUCHI Hiroshi KAKIBAYASHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1998/04/25
Vol. E81-C  No. 4 ; pp. 523-527
Type of Manuscript:  Special Section PAPER (Special Issue on Advanced Memory Devices Using High-Dielectric-Constant and Ferroelectric Thin Films)
Category: 
Keyword: 
epitaxyTEMPZTSrRuO3SrTiO3
 Summary | Full Text:PDF(695.7KB)

A 40GHz fT SATURN Transistor Using 2-Step Epitaxial Base Technology
Hirokazu FUJIMAKI Koji YAMONO Kenichi SUZUKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/04/25
Vol. E79-C  No. 4 ; pp. 549-553
Type of Manuscript:  Special Section PAPER (Special Issue on Ultra-High-Speed LSIs)
Category: 
Keyword: 
bipolar LSIepitaxyself alignmentcut-off frequencyoptical communication
 Summary | Full Text:PDF(509.3KB)