Keyword : environmental degradation


Vacuum Annealing and Passivation of HfS2 FET for Mitigation of Atmospheric Degradation
Vikrant UPADHYAYA Toru KANAZAWA Yasuyuki MIYAMOTO 
Publication:   
Publication Date: 2017/05/01
Vol. E100-C  No. 5 ; pp. 453-457
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
HfS2field effect transistorsenvironmental degradationpassivationPMMAvacuum annealing
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