Keyword : emission microscopy


Study on Parasitic Bipolar Effect in a 200-V-Class Power MOSFET Using Silicon Direct Bonding SOI Wafer
Satoshi MATSUMOTO Toshiaki YACHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/03/25
Vol. E80-C  No. 3 ; pp. 431-435
Type of Manuscript:  Special Section PAPER (Special Issue on SOI Devices and Their Process Technologies)
Category: 
Keyword: 
SOIpower MOSFETparasitic bipolar effectemission microscopy
 Summary | Full Text:PDF

Hot Carrier Evaluation of TFT by Emission Microscopy
Junko KOMORI Jun-ichi MITSUHASHI Shigenobu MAEDA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 367-372
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Device Technology
Keyword: 
hot carrierthin film transistor (TFT)emission microscopyplasma hydrogenation
 Summary | Full Text:PDF