A Novel Combined Proportional-Derivative Control for Electrostatic MEMS Mirror Actuation Weiwei SHANXin CHEN
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2011/09/01 Vol. E94-CNo. 9 ;
pp. 1486-1489 Type of Manuscript: BRIEF PAPER Category: Electronic Instrumentation and Control Keyword: MEMS micro-mirror, electrostatic actuation, closed-loop control,
