Keyword : electron-beam direct writing


Regular Fabric of Via Programmable Logic Device Using EXclusive-or Array (VPEX) for EB Direct Writing
Akihiro NAKAMURA Masahide KAWARASAKI Kouta ISHIBASHI Masaya YOSHIKAWA Takeshi FUJINO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/04/01
Vol. E91-C  No. 4 ; pp. 509-516
Type of Manuscript:  Special Section PAPER (Special Section on Advanced Technologies in Digital LSIs and Memories)
Category: 
Keyword: 
via-programmable logicelectron-beam direct writinglow volume productionexclusive ORstructured ASIClook-up table
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