Publication: IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 2013/12/01
Vol. E96-A
No. 12 ;
pp. 2458-2466
Type of Manuscript:
Special Section PAPER (Special Section on VLSI Design and CAD Algorithms)
Category: Physical Level Design
Keyword:
electron beam direct writing, character projection, VIA, interconnect, routing, |
